Memory device using semiconductor element

ABSTRACT

A memory device includes a page made up of plural memory cells arranged in a column on a substrate, and a page write operation is performed to hold positive hole groups generated by an impact ionization phenomenon, in a channel semiconductor layer by controlling voltages applied to a first gate conductor layer, a second gate conductor layer, a first impurity region, and a second impurity region of each memory cell contained in the page and a page erase operation is performed to remove the positive hole groups out of the channel semiconductor layer by controlling voltages applied to the first gate conductor layer, the second gate conductor layer, the first impurity region, and the second impurity region. The first impurity layer of the memory cell is connected with a source line, the second impurity layer is connected with a bit line, one of the first gate conductor layer and the second gate conductor layer is connected with a word line, and another is connected with a drive control line; during the write operation after the page erase operation, the positive hole group is formed in the channel semiconductor layer by an impact ionization phenomenon by controlling voltages applied to the word line, the drive control line, the source line, and the bit line; and an applied voltage/applied voltages of one or both of the word line and the drive control line is/are lowered with drops in a first threshold voltage of the first gate conductor layer and a second threshold voltage of the second gate conductor layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority under 35 U.S.C. § 119(a) to PCT/JP2021/023517 filed Jun. 22, 2021, the enter content of which is incorporated herein by reference.

TECHNICAL FIELD

The present invention relates to a memory device using a semiconductor element.

BACKGROUND ART

In recent years, there has been demand for greater packaging density and higher performance in LSI (Large Scale Integration) technology development.

With a typical planar MOS transistor, a channel extends in a horizontal direction along an upper surface of a semiconductor substrate. In contrast, a channel of an SGT extends in a direction perpendicular to an upper surface of a semiconductor substrate (see, for example, Patent Literature 1 and Non Patent Literature 1). Consequently, the SGT enables greater packaging density of semiconductor devices than does the planar MOS transistor. The use of the SGT as a select transistor enables high integration of a DRAM (Dynamic Random Access Memory; see, for example, Non Patent Literature 2) connected with a capacitor, a PCM (Phase Change Memory; see, for example, Non Patent Literature 3) connected with a variable resistance element, an RRAM (Resistive Random Access Memory; see, for example, Non Patent Literature 4), and an MRAM (Magneto-resistive Random Access Memory; see, for example, Non Patent Literature 5) that varies resistance by changing an orientation of a magnetic spin using a current. There is also a capacitorless DRAM memory cell made up of a single MOS transistor (see, for example, Non Patent Literature 7). The present application relates to a dynamic flash memory that can be made up solely of a MOS transistor without a variable resistance element or a capacitor.

FIGS. 7A to 7D show a write operation of the capacitorless DRAM memory cell made up of a single MOS transistor, FIGS. 8A and 8B show problems in operations, and FIGS. 9A to 9C show a read operation (see Non Patent Literatures 7 to 10). FIG. 7A shows a 1-written state. Here, a memory cell is formed on an SOI substrate 100 and is made up of a source N⁺ layer 103 (hereinafter a semiconductor region containing a high concentration of donor impurities will be referred to as an “N⁺ layer”) connected with a source line SL, a drain N⁺ layer 104 connected with a bit line BL, a gate conductive layer 105 connected with a word line WL, and a floating body 102 of a MOS transistor 110. That is, a DRAM memory cell is made up of a single MOS transistor 110 without a capacitor. Note that a SiO₂ layer 101 of the SOI substrate is placed in contact with an undersurface of the floating body 102. When “1” is written into the memory cell made up of the single MOS transistor 110, the MOS transistor 110 is operated in a saturation region. That is, an electron channel 107 extending from the source N⁺ layer 103 has a pinch-off point 108 and does not reach the drain N⁺ layer 104 connected with a bit line. If the MOS transistor 110 is operated with a gate voltage set to approximately ½ a drain voltage by applying high voltages to the bit line BL connected to the drain N⁺ layer and the word line WL connected to the gate conductive layer 105 as described above, electric field strength is maximized at the pinch-off point 108 in the vicinity of the drain N⁺ layer 104. As a result, accelerated electrons flowing from the source N⁺ layer 103 towards the drain N⁺ layer 104 collide with a Si lattice, and electron-hole pairs are created by kinetic energy lost at that moment (impact ionization phenomenon). Most of the generated electrons (not shown) reach the drain N⁺ layer 104. Only a few very hot electrons reach the gate conductive layer 105 by jumping over a gate oxide film 109. Positive holes 106 generated at the same time charge the floating body 102. In this case, the generated positive holes contribute as an increment to majority carriers because the floating body 102 is made of p-type Si. The floating body 102 is filled with the generated positive holes 106, and if a voltage of the floating body 102 becomes higher than the source N⁺ layer 103 by Vb or more, positive holes generated further are discharged to the source N⁺ layer 103, where Vb is a built-in voltage of a pn junction between the source N⁺ layer 103 and the floating body 102 in a p-layer, and is approximately 0.7 V. FIG. 7B shows how the floating body 102 is charged to saturation by the generated positive holes 106.

Next, a “0” writing operation of a memory cell 110 will be described using FIG. 7C. There are a memory cell 110 that writes “1” and a memory cell 110 that writes “0” randomly to a common select word line WL. FIG. 7C shows how a 1-written state is changed to a 0-written state. To write “0,” the voltage of bit line BL is negatively biased and a pn junction between the drain N⁺ layer 104 and the floating body 102 in the p-layer is forward biased. As a result, positive holes 106 generated in the floating body 102 beforehand in the previous cycle flows to the drain N⁺ layer 104 connected to the bit line BL. Once the write operation finishes, two states of the memory cell follow: a state in which the memory cell 110 is filled with the generated positive holes 106 (FIG. 7B) and a state in which the generated positive holes are discharged from the memory cell 110 (FIG. 7C). The floating body 102 of the memory cell 110 filled with the positive holes 106 is higher in potential than the floating body 102 free of generated positive holes. Therefore, a threshold voltage of the memory cell 110 written with “1” is lower than a threshold voltage of the memory cell 110 written with “0.” FIG. 7D shows how this looks like.

Next, problems in operations of a memory cell made up of the single MOS transistor 110 will be described using FIGS. 8A and 8B. As shown in FIG. 8A, capacitance C_(FB) of the floating body is the sum total of capacitance C_(WL) between a gate connected with a word line and the floating body, junction capacitance C_(SL) of a pn junction between the source N⁺ layer 103 connected with a source line and the floating body 102, and junction capacitance C_(BL) of a pn junction between the drain N⁺ layer 104 connected with the bit line and the floating body 102; and is given by

C _(FB) =C _(WL) +C _(BL) +C _(SL)  (10)

A capacitive coupling ratio β_(WL) between the gate connected with a word line and the floating body is given by

β_(WL) =C _(WL)/(C _(WL) +C _(BL) +C _(SL))  (11)

Therefore, if a word line voltage V_(WL) swings during reading or writing, a voltage of the floating body 102 serving as a memory node (contact) of the memory cell is also affected. FIG. 8B shows how this looks like. If a word line voltage V_(WL) rises from 0 V to V_(WLH) during reading or writing, a voltage V_(FB) of the floating body 102 rises from V_(FB1) to V_(FB2) due to capacitive coupling with the word line, where V_(FB1) is an initial voltage before the word line voltage changes. The amount of change ΔV_(FB) in voltage is given by

ΔV _(FB) =V _(FB2) −V _(FB1)=β_(WL) ×V _(WLH)  (12)

In β_(WL) in Eq. (11), a contribution ratio of C_(WL) is large, and is expressed, for example, by C_(WL):C_(BL):C_(SL)=8:1:1. In this case, β_(WL)=0.8. If the word line, for example, is 5 V during writing and 0 V after the end of writing, due to capacitive coupling of the word line WL and floating body 102, the floating body 102 is subjected to amplitude noise as high as 5 V×β_(WL)=4 V. This poses a problem in that a sufficient margin of potential difference between a logic 1 potential and logic 0 potential of the floating body 102 cannot be secured during writing.

FIGS. 9A to 9C show a read operation, where FIG. 9A shows a 1-written state and FIG. 9B shows a 0-written state. Actually, however, even if Vb is written into the floating body 102 by writing of “1,” if the word line returns to 0 V when the writing is finished, the floating body 102 is lowered to a negative bias. When “0” is being written, because the floating body 102 is negatively biased further, a sufficiently large margin of potential difference cannot be secured between “1” and “0” during writing as shown in FIG. 9C, making it difficult to commercially introduce really capacitorless DRAM memory cells.

CITATION LIST Patent Literature

-   [Patent Literature 1] Japanese Patent Laid-Open No. 2-188966 -   [Patent Literature 2] Japanese Patent Laid-Open No. 3-171768 -   [Patent Literature 3] Japanese Patent No. 3957774

Non Patent Literature

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SUMMARY OF INVENTION Technical Problem

A capacitorless single-transistor DRAM (gain cell) has a problem in that there is large capacitive coupling between a word line and a floating body and if potential of the word line swings during data read or write, the swings are transmitted as noise directly to the floating body. This causes misreading or erroneous rewriting of stored data, making it difficult to put the capacitorless single-transistor DRAM (gain cell) to practical use.

Solution to Problem

To solve the above problem, a memory device according to the present invention is a memory device, in which a page is made up of a plurality of memory cells arranged in a row direction of a substrate, and a plurality of the pages is arranged in a column direction,

wherein each of the memory cells contained in each of the pages includes:

-   -   a semiconductor base material erected on the substrate in a         vertical direction of the substrate or extended on the substrate         in a horizontal direction,     -   a first impurity layer and a second impurity layer provided on         opposite ends of the semiconductor base material,     -   a first gate insulating layer placed in contact with, or close         to, the first impurity layer, partially or entirely surrounding         a lateral surface of the semiconductor base material between the         first impurity layer and the second impurity layer,     -   a second gate insulating layer joined to the first gate         insulating layer and placed in contact with, or close to, the         second impurity layer, surrounding the lateral surface of the         semiconductor base material,     -   a first gate conductor layer covering part or all of the first         gate insulating layer,     -   a second gate conductor layer covering the second gate         insulating layer, and     -   a channel semiconductor layer in which the semiconductor base         material is covered with the first gate insulating layer and the         second gate insulating layer;     -   a page write operation and a page erase operation are performed         by controlling voltages applied to the first gate conductor         layer, the second gate conductor layer, the first impurity         layer, and the second impurity layer;     -   the first impurity layer of the memory cell is connected with a         source line, the second impurity layer is connected with a bit         line, one of the first gate conductor layer and the second gate         conductor layer is connected with a word line, and another is         connected with a drive control line; and     -   during the write operation after the page erase operation, a         positive hole group is formed in the channel semiconductor layer         by an impact ionization phenomenon by controlling voltages         applied to the word line, the drive control line, the source         line, and the bit line and an applied voltage/applied voltages         of one or both of the word line and the drive control line         is/are lowered with drops in a first threshold voltage of the         first gate conductor layer and a second threshold voltage of the         second gate conductor layer (first aspect).

In the first invention described above, the channel semiconductor layer surrounded by the first gate conductor layer is operated in a saturation region, the channel semiconductor layer surrounded by the second gate conductor layer is operated in a linear region, and the positive hole group is formed in the channel semiconductor layer between the first gate conductor layer and the second gate conductor layer by the impact ionization phenomenon (second aspect).

In the first invention described above, the drive control line of the memory cells arranged in the row direction and in the column direction is disposed in common to adjacent ones of the memory cells (third aspect).

In the first invention described above, first gate capacitance between the first gate conductor layer and the channel semiconductor layer is higher than second gate capacitance between the second gate conductor layer and the channel semiconductor layer (fourth aspect).

In the first invention described above, when viewed in an axial direction of the semiconductor base material, the first gate conductor layer is separated into at least two conductor layers by surrounding the first gate insulating layer (fifth aspect).

In the first invention described above, during the page write operation, a positive hole group generated by the impact ionization phenomenon is held in the channel semiconductor layer, and a voltage of the channel semiconductor layer is set to a first data retention voltage higher than a voltage/voltages of one or both of the first impurity layer and the second impurity layer; and

during the page erase operation, by controlling voltages applied to the first impurity layer, the second impurity layer, the first gate conductor layer, and the second gate conductor layer, the positive hole group is pulled out from one or both of the first impurity layer and the second impurity layer, and the voltage of the channel semiconductor layer is set to a second data retention voltage lower than the first data retention voltage (sixth aspect).

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a structural diagram of a memory device having an SGT according to a first embodiment;

FIGS. 2A, 2B and 2C are diagrams explaining effects produced when gate capacitance of a first gate conductor layer 5 a connected to a plate line PL of the memory device having the SGT according to the first embodiment is made higher than gate capacitance of a second gate conductor layer 5 b connected with a word line WL;

FIGS. 3AA, 3AB, and 3AC are diagrams for explaining a write operation mechanism of the memory device having the SGT according to the first embodiment;

FIG. 3B is a diagram for explaining the write operation mechanism of the memory device having the SGT according to the first embodiment;

FIG. 4A is a diagram for explaining a page erase operation mechanism of the memory device having the SGT according to the first embodiment;

FIGS. 4BA, 4BB, 4BC and 4BD are diagrams for explaining the page erase operation mechanism of the memory device having the SGT according to the first embodiment;

FIG. 4C is a diagram for explaining the page erase operation mechanism of the memory device having the SGT according to the first embodiment;

FIGS. 4DA, 4DB, 4DC and 4DD are diagrams for explaining the page erase operation mechanism of the memory device having the SGT according to the first embodiment;

FIGS. 4EA, 4EB, 4EC and 4ED are diagrams for explaining the page erase operation mechanism of the memory device having the SGT according to the first embodiment;

FIGS. 5A, 5B and 5C are diagrams for explaining a read operation mechanism of the memory device having the SGT according to the first embodiment;

FIG. 6A is a circuit block diagram for explaining a page write operation performed after a page erase operation of the memory device having the SGT according to the first embodiment;

FIG. 6B is a circuit block diagram for explaining the page write operation performed after a page erase operation of the memory device having the SGT according to the first embodiment;

FIG. 6C is a circuit block diagram for explaining the page write operation performed after a page erase operation of the memory device having the SGT according to the first embodiment;

FIG. 6D is a circuit block diagram for explaining the page write operation performed after a page erase operation of the memory device having the SGT according to the first embodiment;

FIG. 6E is an operation waveform diagram for explaining the page write operation performed after a page erase operation of the memory device having the SGT according to the first embodiment;

FIG. 6F is a circuit block diagram for explaining the page write operation performed after a page erase operation of the memory device having the SGT according to the first embodiment;

FIGS. 7A, 7B, 7C and 7D are diagrams for explaining a write operation of a capacitorless DRAM memory cell according to a conventional example;

FIGS. 8A and 8B are diagrams for explaining problems in operations of a capacitorless DRAM memory cell according to a conventional example; and

FIGS. 9A, 9B and 9C are diagrams for explaining a read operation of a capacitorless DRAM memory cell according to a conventional example.

MODE FOR CARRYING OUT THE INVENTION

Embodiments of a memory device (hereinafter referred to as a dynamic flash memory), which uses a semiconductor element, according to the present invention will be described below with reference to the drawings.

First Embodiment

A structure and operation mechanism of a dynamic flash memory cell according to a first embodiment of the present invention will be described below using FIGS. 1 to 5C. The structure of the dynamic flash memory cell will be described using FIG. 1 . Then, using FIGS. 2A to 2C, description will be given of effects produced when gate capacitance of a first gate conductor layer 5 a connected to a plate line PL is made higher than gate capacitance of a second gate conductor layer 5 b connected with a word line WL. Then, a data write operation mechanism will be described using FIGS. 3AA-3AC and 3B, a data erase operation mechanism will be described using FIGS. 4A to 4EA-4ED, and a data read operation mechanism will be described using FIGS. 5A to 5C.

The structure of the dynamic flash memory cell according to the first embodiment of the present invention is shown in FIG. 1 . N⁺ layers 3 a and 3 b (which are examples of a “first impurity layer” and a “second impurity layer” described in Claims), one of which serves as a source while the other serves as a drain, are formed at upper and lower positions in a silicon semiconductor pillar 2 (hereinafter, a silicon semiconductor pillar, which is an example of a “semiconductor base material” described in Claims, will be referred to as a “Si pillar”) formed on a substrate and having a P or i conductivity type (intrinsic type). That part of the Si pillar 2 which is between the N⁺ layers 3 a and 3 b that serve as the source and the drain is a channel region 7 (which is an example of a “channel semiconductor layer” described in Claims). A first gate insulating layer 4 a (which is an example of a “first gate insulating layer” described in Claims) and a second gate insulating layer 4 b (which is an example of a “second gate insulating layer” described in Claims) are formed by surrounding the channel region 7. The first gate insulating layer 4 a and the second gate insulating layer 4 b are placed, respectively, in contact with, or close to, the N⁺ layers 3 a and 3 b that serve as the source and the drain. The first gate conductor layer 5 a (which is an example of a “first gate conductor layer” described in Claims) and the second gate conductor layer 5 b (which is an example of a “second gate conductor layer” described in Claims) are formed by surrounding the first gate insulating layer 4 a and the second gate insulating layer 4 b, respectively. The first gate conductor layer 5 a and the second gate conductor layer 5 b are separated by an insulating layer 6. The channel region 7 between the N⁺ layers 3 a and 3 b is made up of a first channel Si layer 7 a surrounded by the first gate insulating layer 4 a and a second channel Si layer 7 b surrounded by the second gate insulating layer 4 b. This results in formation of a dynamic flash memory cell 10 made up of the N⁺ layers 3 a and 3 b, which are to become the source and the drain, the channel region 7, the first gate insulating layer 4 a, the second gate insulating layer 4 b, the first gate conductor layer 5 a, and the second gate conductor layer 5 b. Then, the N⁺ layer 3 a to become the source is connected to a source line SL (which is an example of a “source line” described in Claims), the N⁺ layer 3 b to become the drain is connected to a bit line BL (which is an example of a “bit line BL” described in Claims), the first gate conductor layer 5 a is connected to the plate line PL (which is an example of a “drive control line” described in Claims), and the second gate conductor layer 5 b is connected to the word line WL (which is an example of a “word line” described in Claims). Desirably the gate capacitance of the first gate conductor layer 5 a connected with the plate line PL is structured to be higher than the gate capacitance of the second gate conductor layer 5 b connected with the word line WL.

Note that in FIG. 1 , the first gate conductor layer 5 a is made larger in gate length than the second gate conductor layer 5 b such that the first gate conductor layer 5 a connected to the plate line PL will be higher in gate capacitance than the second gate conductor layer 5 b connected with the word line WL. In addition, however, instead of making the first gate conductor layer 5 a larger in gate length than the second gate conductor layer 5 b, film thicknesses of the gate insulating layers may be changed such that a gate insulating film of the first gate insulating layer 4 a will be smaller in film thickness than a gate insulating film of the second gate insulating layer 4 b. Also, materials of the gate insulating layers may be varied in permittivity such that the gate insulating film of the first gate insulating layer 4 a will be higher in permittivity than the gate insulating film of the second gate insulating layer 4 b. Besides, the first gate conductor layer 5 a connected to the plate line PL may be made higher in gate capacitance than the second gate conductor layer 5 b connected with the word line WL by combining any of the following: lengths of the gate conductor layers 5 a and 5 b, and film thicknesses and permittivities of the gate insulating layers 4 a and 4 b.

FIGS. 2A to 2C are diagrams explaining effects produced when the gate capacitance of the first gate conductor layer 5 a connected to the plate line PL is made higher than the gate capacitance of the second gate conductor layer 5 b connected with the word line WL.

FIG. 2A is a structural diagram showing only main part the dynamic flash memory cell according to the first embodiment of the present invention in a simplified manner. The dynamic flash memory cell is connected with the bit line BL, the word line WL, the plate line PL, and the source line SL, whose voltage states determine a potential state of the channel region 7.

FIG. 2B is a diagram for explaining relationships among capacitances. Capacitance C_(FB) of the channel region 7 is the sum total of capacitance C_(WL) between the gate conductor layer 5 b connected with the word line WL and the channel region 7, capacitance C_(PL) between the gate conductor layer 5 a connected with the plate line PL and the channel region 7, junction capacitance C_(SL) of a pn junction between the source N⁺ layer 3 a connected with the source line SL and the channel region 7, and junction capacitance C_(BL) of a pn junction between the drain N⁺ layer 3 b connected with the bit line BL and the channel region 7, and is given by

C _(FB) =C _(WL) +C _(PL) +C _(BL) +C _(SL)  (1)

Therefore, a coupling ratio β_(WL) between the word line WL and the channel region 7, a coupling ratio β_(BL) between the plate line PL and the channel region 7, a coupling ratio β_(BL) between the bit line BL and the channel region 7, a coupling ratio β_(SL) between the source line SL and the channel region 7 are given, respectively, by

β_(WL) =C _(WL)/(C _(WL) +C _(PL) +C _(BL) +C _(SL))  (2)

β_(PL) =C _(PL)/(C _(WL) +C _(PL) +C _(BL) +C _(SL))  (3)

β_(BL) =C _(BL)/(C _(WL) +C _(PL) +C _(BL) +C _(SL))  (4) and

β_(SL) =C _(SL)/(C _(WL) +C _(PL) +C _(BL) +C _(SL))  (5),

where C_(PL)>C_(WL), and thus β_(BL)>β_(WL).

FIG. 2C is a diagram for explaining changes of a voltage V_(FB) in the channel region 7 when a voltage V_(WL) of the word line WL rises during read and write operations and falls subsequently. Here, when the voltage V_(WL) of the word line WL rises from 0 V to a high-voltage state V_(WLH) and the voltage V_(FB) of the channel region 7 changes from a low-voltage state V_(FBL) to a high-voltage state V_(FBH), a potential difference Δ_(VFB) is given by

ΔV _(FB) =V _(FBH) −V _(FBL)=β_(WL) ×V _(WLH)  (6)

Because the coupling ratio β_(WL) between the word line WL and the channel region 7 is low and the coupling ratio β_(PL) between the plate line PL and the channel region 7 is high, Δ_(VFB) is low and even if the voltage V_(WL) of the word line WL rises and falls during read and write operations, the voltage V_(FB) of the channel region 7 almost does not change.

A memory write operation (which is an example of a “page write operation” described in Claims) of the dynamic flash memory cell according to the first embodiment of the present invention is shown in FIGS. 3AA to 3AC and FIG. 3B. FIG. 3AA shows a mechanism of the write operation and FIG. 3AB shows operation waveforms of the bit line BL, source line SL, plate line PL, word line WL, and channel region 7, which is indicated as the floating body FB. At time T0, the dynamic flash memory cell is in a 0-erased state and the voltage of the channel region 7 is V_(FB) “0.” Besides, Vss is applied to the bit line BL, the source line SL, and the word line WL while V_(PLL) is applied to the plate line PL. Here, for example, Vss is 0 V and V_(PLL) is 2 V. Next, from time T1 to time T2, when the bit line BL rises from Vss to V_(BLH), for example, if Vss is 0 V, the voltage of the channel region 7 becomes V_(FB) “0”+β_(BL)×V_(BLH) as a result of capacitive coupling between the bit line BL and the channel region 7.

Next, a write operation of the dynamic flash memory cell will be described using FIGS. 3AA and 3AB. From time T3 to time T4, the word line WL rises from Vss to V_(WLH). Consequently, when the second gate conductor layer 5 b connected with the word line WL sets a 0-erasing threshold voltage of a second N-channel MOS transistor region surrounding the channel region 7 to Vt_(WL) “0,” as the voltage of the word line WL rises, from Vss to Vt_(WL) “0,” the voltage of the channel region 7 becomes V_(FB) “0”+β_(BL)×V_(BLH)+β_(WL)×Vt_(WL) “0” as a result of second capacitive coupling between the word line WL and the channel region 7. If the voltage of the word line WL rises to or above Vt_(WL) “0,” an annular inversion layer 12 b is formed in the channel region 7 on an inner circumference of the second gate conductor layer 5 b, blocking the second capacitive coupling between the word line WL and the channel region 7.

Description of the write operation of the dynamic flash memory cell will be continued using FIGS. 3AA and 3AB. From time T3 to time T4, for example, V_(PLL)=2 V is input constantly to the first gate conductor layer 5 a connected with the plate line PL, raising the second gate conductor layer 5 b connected with the word line WL to, for example, V_(WLH)=4 V. Consequently, as shown in FIG. 3AA, an annular inversion layer 12 a is formed in the channel region 7 on an inner circumference of the first gate conductor layer 5 a connected with the plate line PL, with a pinch-off point existing in the inversion layer 12 a. As a result, a first N-channel MOS transistor region having the first gate conductor layer 5 a operates in a saturation region. On the other hand, the second N-channel MOS transistor region having the second gate conductor layer 5 b that is connected with the word line WL operates in a linear region. As a result, no pinch-off point exists in the channel region 7 on the inner circumference of the second gate conductor layer 5 b connected with the word line WL, and the inversion layer 12 b is formed on the entire inner circumference of the second gate conductor layer 5 b. The inversion layer 12 b formed on the entire inner circumference of the second gate conductor layer 5 b connected with the word line WL operates as a virtual drain of the second N-channel MOS transistor region having the second gate conductor layer 5 b that is connected with the word line WL. As a result, an electric field is maximized and an impact ionization phenomenon occurs in a first boundary region of the channel region 7 between the first N-channel MOS transistor region having the first gate conductor layer 5 a that is connected in series and the second N-channel MOS transistor region having the second gate conductor layer 5 b. The first boundary region is a source-side region viewed from the second N-channel MOS transistor region having the second gate conductor layer 5 b that is connected with the word line WL, and thus the phenomenon is called a source-side impact ionization phenomenon. As a result of the source-side impact ionization phenomenon, electrons flow from the N⁺ layer 3 a connected with the source line SL toward the N⁺ layer 3 b connected with the bit line. Accelerated electrons collide with Si lattice atoms and electron-hole pairs are created by kinetic energy of the accelerated electrons. Part of the generated electrons flows to the first gate conductor layer 5 a and the second gate conductor layer 5 b, but most of the electrons flow to the N⁺ layer 3 b connected to the bit line BL (not shown).

As shown in FIG. 3AC, generated positive hole groups 9 (which are examples of a “positive hole group” described in Claims) are majority carriers in the channel region 7 and charge the channel region 7 so as to be positively biased. The N⁺ layer 3 a connected with the source line SL is 0 V and thus the channel region 7 is charged to a built-in voltage Vb (approximately 0.7 V) of a pn junction between the N⁺ layer 3 a connected with the source line SL and the channel region 7. Once the channel region 7 is charged to be positively biased, threshold voltages of the first N-channel MOS transistor region and second N-channel MOS transistor region fall due to a substrate bias effect.

Description of the write operation of the dynamic flash memory cell will be continued using FIG. 3AB. From time T6 to time T7, the voltage of the word line WL drops from V_(WLH) to Vss. In so doing, the word line WL and the channel region 7 form the second capacitive coupling, but until the voltage V_(WLH) of the word line WL becomes equal to or lower than the threshold voltage Vt_(WL) “1” of the second N-channel MOS transistor region when the voltage of the channel region 7 is Vb, the inversion layer 12 b blocks the second capacitive coupling. Therefore, virtual capacitive coupling between the word line WL and the channel region 7 is enabled only when the word line WL becomes equal to or lower than Vt_(WL) “1” and falls to Vss. As a result, the voltage of the channel region 7 becomes Vb−β_(WL)×Vt_(WL) “1.” Here, Vt_(WL) “1” is lower than Vt_(WL) “0” described above, and thus β_(WL)×Vt_(WL) “1” is low.

Description of the write operation of the dynamic flash memory cell will be continued using FIG. 3AB. From time T8 to time T9, the bit line BL drops from V_(BLH) to Vss. Since the bit line BL and the channel region 7 are capacitively coupled, eventually “1”-writing voltage V_(FB) “1” of the channel region 7 becomes as follows.

V _(FB)“1”=Vb−β _(WL) ×Vt _(WL)“1”−β_(BL) ×V _(BLH)  (7),

where the coupling ratio β_(BL) between the bit line BL and the channel region 7 is also low. Consequently, as shown in FIG. 3B, the threshold voltage of the second N-channel MOS transistor region of a second channel region 7 b connected with the word line WL becomes low. A 1-written state of the channel region 7 is set to a first data retention voltage (which is an example of a “first data retention voltage” described in Claims). A memory write operation is performed and this state is assigned to logical storage data “1.”

Note that in the write operation, electron-hole pairs may be generated by an impact ionization phenomenon in a second boundary region between a first impurity layer 3 a and a first channel semiconductor layer 7 a or in a third boundary region between a second impurity layer 3 b and a second channel semiconductor layer 7 b rather than in the first boundary region, and the channel region 7 may be charged with the generated positive hole groups 9.

Note that conditions of the voltages applied to the bit lines BL, the source lines SL, the word lines WL, and the plate lines PL as well as the potential of the floating body are exemplary in performing write operations, and other conditions that allow write operations to be performed may be used.

A mechanism of a memory erase operation (which is an example of a “memory erase operation” described in Claims) will be described using FIGS. 4A to 4EA-4ED.

A circuit diagram of a memory block is shown in FIG. 4A to explain a page erase operation. Whereas 3 rows by 3 columns of memory cells for a total of nine memory cells CL₁₁ to CL₃₃ are shown here, an actual memory block is larger than this matrix. When memory cells are arrayed in a matrix, one direction of the array is referred to as a “row direction” (or a “row-wise direction”) and a direction perpendicular to the row direction is referred to as a “column direction” (or a “column-wise direction”). The memory cells are connected with the respective source lines SL, bit lines BL₁ to BL₃, plate lines PL₁ to PL₃, and word lines WL₁ to WL₃. For example, it is assumed that in this block, a page erase operation is performed by selecting from memory cells CL₂₁ to CL₂₃ connected with the plate line PL₂ and the word line WL₂ of a desired page (which is an example of a “page” described in Claims).

A mechanism of a page erase operation will be described using FIGS. 4BA to 4BD and 4C. Here, the channel region 7 between the N⁺ layers 3 a and 3 b is electrically separated from the substrate, making up a floating body. FIG. 4BA shows a timing operation waveform diagram of main nodes of the erase operation. In FIG. 4BA, T0 to T12 indicates times from start to end of the erase operation. FIG. 4BB shows that at time TO before the erase operation, the positive hole groups 9 generated by impact ionization in the previous cycle are stored in the channel region 7. Then, from time T1 to time T2, the bit lines BL₁ to BL₃ and the source line SL change from Vss to a high-voltage state of V_(BLH) or V_(SLH). Here, Vss is, for example, 0 V. In this operation from time T3 to time T4 in the next period, the plate line PL₂ and the word line WL₂ selected in the page erase operation go high from a first voltage V_(PLL) to a second voltage V_(PLH) and from a third voltage Vss to a fourth voltage V_(WLH), thereby preventing the inversion layer 12 a on the inner circumference of the first gate conductor layer 5 a connected with the plate line PL₂ and the inversion layer 12 b on the inner circumference of the second gate conductor layer 5 b connected with the word line WL₂ from being formed, respectively, in the channel region 7. Therefore, if the threshold voltages of the second N-channel MOS transistor region on the side of the word line WL₂ and the first N-channel MOS transistor region on the side of the plate line PL₂ are V_(tWL) and V_(tPL), respectively, preferably the voltages V_(BLH) and V_(SLH) satisfy V_(BLH)>V_(WLH)+V_(tWL) and V_(SLH)>V_(PLH)+V_(tPL), respectively. For example, if V_(tWL) and V_(tPL) are 0.5 V, V_(WLH) and V_(PLH) can be set to 3 V and V_(BLH) and V_(SLH) can be set to 3.5 V or above.

Description of the page erase operation mechanism in FIG. 4BA will be continued. From time T3 to time T4 in the first period, as the plate line PL₂ and the word line WL₂ go high to the second voltage V_(PLH) and the fourth voltage V_(WLH), the voltage of the channel region 7 in a floating state is pushed up by first capacitive coupling between the plate line PL₂ and the channel region 7 and second capacitive coupling between the word line WL₂ and the channel region 7. The voltage of the channel region 7 goes high from V_(FB) “1” in a 1-written state. This is because the voltages of the bit lines BL₁ to BL₃ and source line SL are high, namely, V_(BLH) and V_(SLH), making the pn junction between the N⁺ layer 3 a and the channel region 7 and the pn junction between the drain N⁺ layer 3 b and the channel region 7 reverse-biased, which enables boosting.

Description of the page erase operation mechanism in FIG. 4BA will be continued. From time T5 to time T6 in the next period, the voltages of the bit lines BL₁ to BL₃ and source line SL drop to Vss from high voltages of V_(BLH) and V_(SLH). As a result, the pn junction between the N⁺ layer 3 a and the channel region 7 and the pn junction between the drain N⁺ layer 3 b and the channel region 7 become forward-biased as shown in FIG. 4BC and positive hole groups remaining from the positive hole groups 9 of the channel region 7 are discharged to the source N⁺ layer 3 a and the drain N⁺ layer 3 b. Consequently, the voltage V_(FB) of the channel region 7 becomes the built-in voltage Vb of the pn junction formed by the source N⁺ layer 3 a and the channel region 7 in a p-layer and the pn junction formed by the drain N⁺ layer 3 b and the channel region 7 in the p-layer.

Description of the page erase operation mechanism in FIG. 4BA will be continued. Next, from time T7 to time T8, the voltages of the bit lines BL₁ to BL₃ and source line SL go high to V_(BLH) and V_(SLH) from Vss. With this measure, as shown in FIG. 4BD, in lowering the plate line PL₂ and the word line WL₂ from the second voltage V_(PLH) and the fourth voltage V_(WLH) to the first voltage V_(PLL) and the third voltage Vss, respectively, from time T9 to time T10, the voltage V_(FB) of the channel region 7 is changed effectively from Vb to V_(FB) “0” by the first capacitive coupling between the plate line PL₂ and the channel region 7 and the second capacitive coupling between the word line WL₂ and the channel region 7 without forming the inversion layer 12 a on the side of the plate line PL₂ and the inversion layer 12 b on the side of the word line WL₂ in the channel region 7. Thus, a voltage difference ΔV_(FB) of the channel region 7 between the 1-written state and the 0-erased state is given by the following equations.

V _(FB)“1”=Vb−β _(WL) ×Vt _(WL)“1”−β_(BL) ×V _(BLH)  (7)

V _(FB)“0”=Vb−β _(WL) ×V _(WLH)−β_(PL)×(V _(PLH) −V _(PLL))  (8)

ΔV _(FB) =V _(FB)“1”−V _(FB)“0”=β_(WL) ×V _(WLH)+β_(PL)×(V _(PLH) −V _(PLL))−β_(WL) ×Vt _(WL)“1”−β_(BL) ×V _(BLH)  (9),

where the sum of β_(WL) and β_(PL) is 0.8 or above, making ΔV_(FB) large enough to provide a sufficient margin.

Consequently, as shown in FIG. 4C, a large margin can be provided between the 1-written state and the 0-erased state. Here, in the 0-erased state, the threshold voltage on the side of the plate line PL₂ is high due to the substrate bias effect. Therefore, if an applied voltage of the plate line PL₂ is set, for example, equal to or lower than the threshold voltage, the first N-channel MOS transistor region on the side of the plate line PL₂ becomes nonconducting and does not pass a memory cell current. “PL: Nonconducting” on the right side of FIG. 4C shows this situation.

Description of the page erase operation mechanism in FIG. 4BA will be continued. Next, from time T11 to time T12 in the fourth period, the voltages of the bit lines BL₁ to BL₃ and source line SL fall to Vss from V_(BLH) and V_(SLH), respectively, ending the erase operation. In so doing, the bit lines BL₁ to BL₃ and the source line SL lower the voltage of the channel region 7 slightly due to capacitive coupling, but this is equivalent to the amount of the voltage of the channel region 7 raised by the bit lines BL₁ to BL₃ and the source line SL due to capacitive coupling from time T7 to time T8, and thus the raising and lowering of the voltages of the bit lines BL₁ to BL₃ and source line SL are canceled out and consequently the voltage of the channel region 7 is not affected. The voltage V_(FB) “0” of the channel region 7 in the 0-erased state is set to a second data retention voltage (which is an example of a “second data retention voltage” described in Claims). A page erase operation is performed and this state is assigned to logical storage data “0.” During data read after the erase operation, if the voltage to be applied to the first gate conductor layer 5 a joined to the plate line PL is set higher than the threshold voltage at a time when the logical storage data is “1” and lower than the threshold voltage at a time when the logical storage data is “0,” the property that no current flows even if the voltage of the word line WL is increased is obtained as shown in FIG. 4C.

Next, a mechanism of the page erase operation will be described using FIGS. 4DA to 4DD. FIGS. 4DA to 4DD differ from FIGS. 4BA to 4BD in that during the page erase operation the bit lines BL₁ to BL₃ are set to Vss or kept in a floating state and that the word line WL₂ is fixed at Vss. Consequently, from time T1 to time T2, even if the source line SL rises from Vss to V_(SLH), the second N-channel MOS transistor region of the word line WL₂ remains nonconducting and no memory cell current flows. Thus, there is no generation of positive hole groups 9 due to the impact ionization phenomenon. Besides, as with FIGS. 4BA to 4BD, the source line SL swings between Vss and V_(SLH) while the plate line PL₂ swings between V_(PLL) and V_(PLH). Consequently, as shown in FIG. 4DC, the positive hole groups 9 are discharged to the N⁺ layer 3 a of the source line SL.

Next, the mechanism of the page erase operation will be described using FIGS. 4EA to 4ED. FIGS. 4EA to 4ED differ from FIGS. 4BA to 4BD in that during the page erase operation the source line SL is set to Vss or kept in a floating state and that the plate line PL₂ is fixed at Vss. Consequently, from time T1 to time T2, even if the bit lines BL₁ to BL₃ rise from Vss to V_(BLH), the first N-channel MOS transistor region of the plate line PL₂ remains nonconducting and no memory cell current flows. Thus, there is no generation of positive hole groups 9 due to the impact ionization phenomenon. Besides, as with FIGS. 4BA to 4BD, the bit lines BL₁ to BL₃ swing between Vss and V_(BLH) and the word line WL₂ swings between Vss and V_(WLH). Consequently, as shown in FIG. 4EC, the positive hole groups 9 are discharged to the N⁺ layer 3 b of the bit lines BL₁ to BL₃.

Note that conditions of the voltages applied to the bit lines BL, the source lines SL, the word lines WL, and the plate lines PL as well as the potential of the floating body are exemplary in performing a page erase operation, and other conditions that allow a page erase operation to be performed may be used.

FIGS. 5A to 5C are diagrams for explaining a read operation of the dynamic flash memory cell according to the first embodiment of the present invention. As shown in FIG. 5A, when the channel region 7 is charged to the built-in voltage Vb (approximately 0.7 V), the threshold voltage of the second N-channel MOS transistor region having the second gate conductor layer 5 b that is connected with the word line WL drops due to the substrate bias effect. This state is assigned to logical storage data “1.” As shown in FIG. 5B, a memory block selected before a write is set to an erased state “0” in advance and the voltage V_(FB) of the channel region 7 is V_(FB) “0.” As a result of write operations, a written state “1” is stored randomly. As a result, logical storage data of logic “0” and logic “1” is created for the word line WL. As shown in FIG. 5C, using a height difference between two threshold voltages for the word line WL, reading is done by a sense amplifier. During data read, if the voltage to be applied to the first gate conductor layer 5 a joined to the plate line PL is set higher than the threshold voltage at a time when the logical storage data is “1” and lower than the threshold voltage at a time when the logical storage data is “0,” the property that no current flows even if the voltage of the word line WL is increased is obtained as shown in FIG. 5C.

Note that conditions of the voltages applied to the bit lines BL, the source lines SL, the word lines WL, and the plate lines PL as well as the potential of the floating body are exemplary in performing read operations, and other conditions that allow read operations to be performed may be used.

A page write operation (which is an example of a “page write operation” described in Claims) performed after a page erase operation (which is an example of a “page erase operation” described in Claims) of the dynamic flash memory cell according to the first embodiment of the present invention will be described using FIGS. 6A to 6E.

In FIG. 6A, three rows by three columns of memory cells C00 to C22 make up part of a memory cell block. Whereas three rows by three columns of memory cells C00 to C22 are shown here, in an actual memory cell block, memory cells make up a matrix larger than a 3-row by 3-column matrix. The memory cells are connected with respective word lines WL0 to WL2, plate lines PL0 to PL2, source lines SL, and bit lines BL0 to BL2. Transistors T0C to T2C to whose gates transfer signals FT are input make up a switch circuit. Also, drains of transistors T0D to T2D whose gates are connected to an erase signal FS are connected to bit line erase signals VB and sources are connected to the respective bit lines BL0 to BL2. Then, the bit lines BL0 to BL2 are connected to respective sense amplifier circuits SA0 to SA2 via switch circuits. The sense amplifier circuits SA0 to SA2 are connected to a pair of input-output lines IO and /IO complementary to each other via transistors T0A and T2B whose gates are connected to column selection lines CSL0 to CSL2.

FIG. 6B shows how “1” is written into memory cells C02, C10, and C12 randomly out of the memory cells C00 to C22 with arbitrary timing, positive hole groups 9 are accumulated in the channel semiconductor layers 7 of the memory cells, and a page erase operation is performed with respect to the group of memory cells C01, C11, and C21 selected by the word lines WL1.

A page write operation will be described using FIGS. 6C and 6E. Page data written into the sense amplifier circuits SA0 to SA2 is written into the group of memory cells C01, C11, and C21 selected by the word line WL1, thereby performing a page write operation. Description will be given here of a case in which “1” is written, for example, into the memory cells C01 and C21 while the memory cell C11 maintains 0-erased state, based on page data. From time W1 to time W2, applied voltages of the bit lines BL0 and BL2 rise from a low voltage Vss of the bit lines to a high voltage V_(BLW) for use to write “1” while the bit line BL1 maintains Vss. Vss may be, for example, 0 V.

Since a page erase operation is performed before the page write operation, a first threshold voltage (which is an example of a “first threshold voltage” described in Claims) of the first gate conductor layer 5 a and a second threshold voltage (which is an example of a “second threshold voltage” described in Claims) of the second gate conductor layer 5 b are, for example, as high as 1.3 V in a 0-erased state, where the memory cells C01 and C21 are connected with the plate line PL1 and the word line WL1 in the first gate conductor layer 5 a and the second gate conductor layer 5 b. Consequently, from time W3 to time W4, a high voltage V_(PLH) for use to write “1” is applied to the plate line PL1 by changing from a low voltage V_(PLL). Also, a high voltage V_(WLW) for use to write “1” is applied to the word line WL₁ by changing from the low voltage Vss. As a result, a memory cell current flows through the channel semiconductor layers 7 of the memory cells C01 and C21 and positive hole groups 9 are formed in the channel semiconductor layers 7 due to the impact ionization phenomenon. In passing the memory cell current through the channel semiconductor layers 7, the first gate conductor layer 5 a and the second gate conductor layer 5 b may operate both the first channel semiconductor layer 7 a and second channel semiconductor layer 7 b, which are surrounded by the first gate conductor layer 5 a and the second gate conductor layer 5 b, in a linear region (which is an example of a “linear region” described in Claims). However, to cause a source-side impact ionization phenomenon effectively in an intermediate region between the first channel semiconductor layer 7 a and the second channel semiconductor layer 7 b, desirably the first channel semiconductor layer 7 a surrounded by the first gate conductor layer 5 a is operated in a saturation region (which is an example of a “saturation region” described in Claims) and the second channel semiconductor layer 7 b surrounded by the second gate conductor layer 5 b is operated in a linear region. Under these conditions, the inversion layer formed in the second channel semiconductor layer 7 b works as a pseudo-drain (virtual drain) extending from the bit line BL.

The first threshold voltage of the first gate conductor layer 5 a and the second threshold voltage of the second gate conductor layer 5 b drop, for example, from 1.3 V when positive hole groups 9 start to be formed in the channel semiconductor layers 7, where the memory cells C01 and C21 are connected with the plate line PL1 and the word line WL1 in the first gate conductor layer 5 a and the second gate conductor layer 5 b. With drops in the first threshold voltage and the second threshold voltage, at time W5, the plate line PL1 is lowered to the low voltage V_(PLL) from the high voltage V_(PLH) for use to write “1.” Here, V_(PLH) and V_(PLL) may be, for example, 1.4 V and 0.8 V, respectively. Besides, even if the plate line PL1 is lowered to the low voltage V_(PLL), the formation of positive hole groups 9 in the channel semiconductor layers 7 due to the source-side impact ionization phenomenon continues. The rest of the page write operation is similar to the page write operation described in FIG. 3AB.

A page read operation will be described using FIG. 6D. Page data stored in the group of memory cells C01, C11, and C21 is read into the forced-inverting sense amplifier circuits SA0 to SA2. In FIG. 6C, concurrently with the page read operation, a refresh operation is performed to form positive hole groups 9 by the impact ionization phenomenon in the channel semiconductor layers 7 of the memory cells C01 and C21 written with “1.” The threshold voltages of the first gate conductor layer 5 a and the second gate conductor layer 5 b, in which the memory cells C01 and C21 are connected with the plate line PL1 and the word line WL1, drop as much as 1 V, for example, from 1.3 V in the 0-erased state to 0.3 V in the 1-written state. Therefore, if a voltage lower than the voltage for a “1” writing operation is input to the plate line PL1 and the word line WL1, a refresh operation can be performed to form positive hole groups 9 by the impact ionization phenomenon in the channel semiconductor layers 7 of the memory cells C01 and C21. As a result, even if the number of positive hole groups 9 has been reduced in the channel semiconductor layers 7 of the memory cells C01 and C21 written with “1,” the refresh operation returns the positive hole groups 9 to the 1-written state. The refresh operation is similar to the refresh operation described in FIGS. 3AA to 3AC.

From time R1 to time R3 shown in FIG. 6E, the page data stored in the group of memory cells C01, C11, and C21 is read into the sense amplifier circuits SA0 to SA2. At time R1, the word line WL1 connected to the group of memory cells C01, C11, and C21 rises from the low voltage Vss to a high voltage V_(WLR) for reading and at time R2, the bit lines BL0 to BL2 rise from the low voltage Vss to a high voltage V_(BLR) for reading. As a result, in the channel semiconductor layers 7 of the memory cells C01 and C21, memory cell currents flow from the bit lines BL0 and BL2 to the source lines SL. The memory cell currents cause the impact ionization phenomenon in the channel semiconductor layers 7 of the memory cells C01 and C21, forming positive hole groups 9 and allowing a refresh operation to be performed. Here, Vss may be, for example, ground voltage=0 V. Then, at time R3, the word line WL1 falls from the high voltage V_(WLR) for reading to the low voltage Vss. During the page read operation, a fixed voltage V_(PLL) is applied to the plate line PL1. Finally, at time R4, the bit line BL1 is reset to Vss from the high voltage V_(BLR) for reading to finish the page read operation.

FIG. 6F shows an example in which a plate line PL is shared by adjacent memory cells in a 3-row by 3-column block of memory cells C00 to C22. Again, in a configuration of FIG. 6F, the page write operation after a page erase operation of the dynamic flash memory cell according to the first embodiment of the present invention can be performed similarly.

In FIG. 1 , operation of the dynamic flash memory described in the present embodiment can be performed even if a horizontal sectional shape of the Si pillar 2 is circular, elliptical, or rectangular. Besides, circular, elliptical, and rectangular dynamic flash memory cells may be allowed to coexist on a same chip.

In FIG. 1 , a dynamic flash memory element has been described by taking as an example an SGT that includes the first gate insulating layer 4 a surrounding an entire lateral surface of the Si pillar 2 erected in a vertical direction on a substrate, the second gate insulating layer 4 b, and the first gate conductor layer 5 a and second gate conductor layer 5 b surrounding the entire first gate insulating layer 4 a and second gate insulating layer 4 b. As indicated in the description of the present embodiment, it is sufficient if the present dynamic flash memory element is structured to satisfy the condition that the positive hole groups 9 generated by the impact ionization phenomenon are held in the channel region 7. For that, it is sufficient that the channel region 7 has a floating body structure separated from the substrate 1. Consequently, the above-mentioned operation of the dynamic flash memory can be performed using, for example, GAA (Gate All Around; see, for example, Non Patent Literature 10) technology or Nanosheet technology (see, for example, Non Patent Literature 11), which are one of SGT even if the semiconductor base material of the channel region is formed horizontally to the substrate 1. A device structure (see, for example, Non Patent Literatures 7 to 10) that uses SOI (Silicon On Insulator) may also be used. In this device structure, a bottom of a channel region is in contact with an insulating layer of an SOI substrate and surrounds other channel regions while being surrounded by a gate insulating layer and an element separating insulating layer. In this structure, again the channel region has a floating body structure. In this way, it is sufficient if the dynamic flash memory element provided by the present embodiment satisfies the condition that the channel region has a floating body structure. Even with a structure in which a Fin transistor (see, for example, Non Patent Literature 13) is formed on an SOI substrate, the present dynamic flash operation can be performed as long as the channel region has a floating body structure.

Equations (1) to (12) in the present specification and drawings are used to quantitatively describe phenomena, and are not intended to limit the phenomena.

Note that whereas in the description of FIGS. 3AA to 3AC and 3B, a reset voltage of the word line WL, the bit line BL, and the source line SL is indicated as being Vss, different reset voltages may be used for the different lines.

Besides, an example of conditions for the page erase operation has been shown in FIG. 4A and in the description of FIG. 4A. In contrast, if a situation in which the positive hole groups 9 in the channel region 7 are removed from both or one of the N⁺ layer 3 a and N⁺ layer 3 b can be realized, the voltages applied to the source line SL, the plate line PL, the bit line BL, and the word line WL may be changed. Also, in the page erase operation, the bit line BL may be placed in a floating state by applying a voltage to the source line SL of a selected page. Also, in the page erase operation, the source line SL may be placed in a floating state by applying a voltage to the bit line BL of a selected page.

Besides, in a vertical direction in FIG. 1 , in that part of the channel region 7 which is surrounded by the insulating layer 6, which is the first insulating layer, potential distributions of a first channel region 7 a and a second channel region 7 b are formed by being joined together. Consequently, the first channel region 7 a and the second channel region 7 b of the channel region 7 are joined together in the vertical direction via a region surrounded by the insulating layer 6, which is the first insulating layer.

Note that in FIG. 1 , desirably vertical length of the first gate conductor layer 5 a connected with the plate line PL is made still larger than vertical length of the second gate conductor layer 5 b connected with the word line WL such that C_(PL)>C_(WL). However, by merely adding the plate line PL, a capacitive coupling ratio (C_(WL)/(C_(PL)+C_(WL)+C_(BL)+C_(SL))) of the word line WL to the channel region 7 is reduced. This reduces a potential fluctuation ΔV_(FB) in the channel region 7 of the floating body.

Whereas in an operation waveform diagram of FIG. 6E, voltages of the bit line BL, the word line WL, and the plate line PL are expressly indicated in a concrete manner, it is sufficient if voltage conditions are such that positive hole groups 9 will be formed by causing the impact ionization phenomenon in the channel region 7 using a memory cell current during the page write operation after a page erase operation.

Besides, a fixed voltage of, for example, approximately 1 V may be applied as the voltage V_(PLL) of the plate line PL.

Note that in the present specification and the claims, the expression “a gate insulating layer, a gate conductor layer, or the like covers a channel or the like,” the meanings of the term “covers” include surrounding an entire object such as in the case of an SGT or GAA, surrounding an object by leaving part of the object such as in the case of a Fin transistor, and furthermore lying over a planar object such as in the case of a planar transistor.

In FIG. 1 , the first gate conductor layer 5 a surrounds the entire first gate insulating layer 4 a. In contrast, the first gate conductor layer 5 a may be structured to surround part of the first gate insulating layer 4 a in planar view. The first gate conductor layer 5 a may be divided into at least two gate conductor layers and operated as electrodes of plate lines PL. Similarly, the second gate conductor layer 5 b may be divided into two or more parts, each of which may be operated synchronously or asynchronously as a conductor electrode of a word line. This enables dynamic flash memory operation.

Whereas a read operation of a 1-bit dynamic flash memory cell made up of one piece of semiconductor base material has been described in FIGS. 6A to 6F, the present invention is also effective with respect to operation modes of a 1-bit high-speed dynamic flash memory cell made up of two pieces of semiconductor base material configured to store complementary data of “1” and “0.”

Whereas a page read operation of a memory array formed of a single layer of a 1-bit dynamic flash memory cell made up of one piece of semiconductor base material has been described in FIGS. 6A to 6F, the present invention is also effective with respect to a multi-layer memory array formed by stacking multiple tiers of 1-bit dynamic flash memory cells each made up of one piece of semiconductor base material.

Besides, in FIG. 1 , the first gate conductor layer 5 a may be divided into two or more parts, which may be operated synchronously or asynchronously, each as a conductor electrode of a plate line, by a same drive voltage or different drive voltages. Similarly, the second gate conductor layer 5 b may be divided into two or more parts, which may be operated synchronously or asynchronously, each as a conductor electrode of a word line, by a same drive voltage or different drive voltages. This also enables dynamic flash memory operation. When the first gate conductor layer 5 a is divided into two or more parts, at least one of the resulting first gate conductor layers serves the role of the first gate conductor layer 5 a. Also, when the second gate conductor layer 5 b is divided, at least one of the resulting second gate conductor layers serves the role of the second gate conductor layer 5 b.

Besides, in FIG. 1 , the first gate conductor layer 5 a may be connected to the word line WL and the second gate conductor layer 5 b may be connected to the plate line PL. This also enables the present dynamic flash memory operation described above.

Besides, the conditions of the voltages applied to the bit lines BL, the source lines SL, the word lines WL, and the plate lines PL as well as the voltage of the floating body are exemplary in performing basic operations including erase operations, write operations, and read operations, and other voltage conditions that allow the basic operations of the present invention to be performed may be used.

The present embodiment has the following features.

(Feature 1)

In the dynamic flash memory cell according to the present embodiment, the N⁺ layers 3 a and 3 b, which are to become the source and the drain, the channel region 7, the first gate insulating layer 4 a, the second gate insulating layer 4 b, the first gate conductor layer 5 a, and the second gate conductor layer 5 b are formed into the shape of a pillar as a whole. Then, the N⁺ layer 3 a to become the source is connected to the source line SL, the N⁺ layer 3 b to become the drain is connected to the bit line BL, the first gate conductor layer 5 a is connected to the plate line PL, and the second gate conductor layer 5 b is connected to the word line WL. The dynamic flash memory cell is characterized in that the gate capacitance of the first gate conductor layer 5 a connected with the plate line PL is structured to be higher than the gate capacitance of the second gate conductor layer 5 b connected with the word line WL. In the present dynamic flash memory cell, the first gate conductor layer and the second gate conductor layer are stacked in the vertical direction. Consequently, even if the gate capacitance of the first gate conductor layer 5 a connected with the plate line PL is structured to be higher than the gate capacitance of the second gate conductor layer 5 b connected with the word line WL the area of the memory cell is not increased in planar view. This makes it possible to achieve higher performance and greater packaging density of the dynamic flash memory cell at the same time.

(Feature 2)

During the page write operation after the page erase operation of the dynamic flash memory cell according to the first embodiment of the present invention, positive hole groups can be formed in the channel semiconductor layer of the memory cell by the impact ionization phenomenon. In particular, because the threshold voltage of the channel semiconductor layer after the page erase operation is high, the applied voltage of the plate line PL has to be made higher than the threshold voltage. However, it is sufficient to increase the applied voltage of the plate line PL only at the beginning of the page write operation, and the applied voltage can be lowered with decreases in the threshold voltage. As a result, electric power during the page write operation is reduced greatly. Also, application of unnecessarily high voltage can be reduced, making it possible to provide a highly reliable memory device.

(Feature 3)

Taking a look at the role of the first gate conductor layer 5 a connected with the plate line PL of the dynamic flash memory cell according to the first embodiment of the present invention, when the dynamic flash memory cell performs write and read operations, the voltage of the word line WL swings up and down. In so doing, the plate line PL serves the role of reducing the capacitive coupling ratio between the word line WL and the channel region 7. This makes it possible to greatly reduce the effect of voltage variations of the channel region 7 when the voltage of the word line WL swings up and down. This in turn makes it possible to increase a difference in the threshold voltage of an SGT transistor of the word line WL, the difference representing logic “0” or logic “1.” This leads to an increase in an operating margin of the dynamic flash memory cell.

Besides, in writing “1,” using a gate induced drain leakage (GIDL) current described in Non Patent Literatures 10 and 11, electron-hole pairs may be generated by the impact ionization phenomenon and the floating body FB may be filled with generated positive hole groups. This similarly applies to other embodiments of the present invention.

Also, in FIG. 1 , in a structure in which polarity of conductivity type of each of the N⁺ layers 3 a and 3 b and p-layer Si pillar 2 is reversed, the dynamic flash memory operation is performed. In this case, in the Si pillar 2, which is N-type, majority carriers become electrons. Thus, electron groups generated by impact ionization are accumulated in the channel region 7, and a “1” state is established.

Other Embodiments

Note that whereas a Si pillar is formed in the present invention, a semiconductor pillar made of a semiconductor material other than Si may be used. This similarly applies to other embodiments of the present invention.

The present invention can be embodied or modified in various forms without departing from the spirit and scope of the present invention in a broad sense. Also, the embodiments described above are meant to be illustrative, and not to limit the scope of the present invention. The embodiments and variations described above can be combined as desired. Furthermore, even if some components of the embodiments described above are removed as required, the resulting inventions fall within the scope of the technical idea of the present invention.

INDUSTRIAL APPLICABILITY

The memory device that uses a semiconductor element according to the present invention provides a dynamic flash memory, which is a memory device that uses a high-performance SGT with great packaging density. 

1. A memory device that uses a semiconductor element, in which a page is made up of a plurality of memory cells arranged in a row direction of a substrate, and a plurality of the pages is arranged in a column direction, wherein each of the memory cells contained in each of the pages includes: a semiconductor base material erected on the substrate in a vertical direction of the substrate or extended on the substrate in a horizontal direction, a first impurity layer and a second impurity layer provided on opposite ends of the semiconductor base material, a first gate insulating layer placed in contact with, or close to, the first impurity layer, partially or entirely surrounding a lateral surface of the semiconductor base material between the first impurity layer and the second impurity layer, a second gate insulating layer joined to the first gate insulating layer and placed in contact with, or close to, the second impurity layer, surrounding the lateral surface of the semiconductor base material, a first gate conductor layer covering part or all of the first gate insulating layer, a second gate conductor layer covering the second gate insulating layer, and a channel semiconductor layer in which the semiconductor base material is covered with the first gate insulating layer and the second gate insulating layer; a page write operation and a page erase operation are performed by controlling voltages applied to the first gate conductor layer, the second gate conductor layer, the first impurity layer, and the second impurity layer; the first impurity layer of the memory cell is connected with a source line, the second impurity layer is connected with a bit line, one of the first gate conductor layer and the second gate conductor layer is connected with a word line, and another is connected with a drive control line; and during the write operation after the page erase operation, a positive hole group is formed in the channel semiconductor layer by an impact ionization phenomenon by controlling voltages applied to the word line, the drive control line, the source line, and the bit line and an applied voltage/applied voltages of one or both of the word line and the drive control line is/are lowered with drops in a first threshold voltage of the first gate conductor layer and a second threshold voltage of the second gate conductor layer.
 2. The memory device that uses a semiconductor element according to claim 1, wherein the channel semiconductor layer surrounded by the first gate conductor layer is operated in a saturation region, the channel semiconductor layer surrounded by the second gate conductor layer is operated in a linear region, and the positive hole group is formed in the channel semiconductor layer between the first gate conductor layer and the second gate conductor layer by the impact ionization phenomenon.
 3. The memory device that uses a semiconductor element according to claim 1, wherein the drive control line of the memory cells arranged in the row direction and in the column direction is disposed in common to adjacent ones of the memory cells.
 4. The memory device that uses a semiconductor element according to claim 1, wherein first gate capacitance between the first gate conductor layer and the channel semiconductor layer is higher than second gate capacitance between the second gate conductor layer and the channel semiconductor layer.
 5. The memory device that uses a semiconductor element according to claim 1, wherein when viewed in an axial direction of the semiconductor base material, the first gate conductor layer is separated into at least two conductor layers by surrounding the first gate insulating layer.
 6. The memory device that uses a semiconductor element according to claim 1, wherein during the page write operation, a positive hole group generated by the impact ionization phenomenon is held in the channel semiconductor layer, and a voltage of the channel semiconductor layer is set to a first data retention voltage higher than a voltage/voltages of one or both of the first impurity layer and the second impurity layer; and during the page erase operation, by controlling voltages applied to the first impurity layer, the second impurity layer, the first gate conductor layer, and the second gate conductor layer, the positive hole group is pulled out from one or both of the first impurity layer and the second impurity layer, and the voltage of the channel semiconductor layer is set to a second data retention voltage lower than the first data retention voltage. 